Studies on phase Ronchi gratings and the fabrication of soft x-ray condenser zone plates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5636, Issue PART 1, 2005, Pages 150-158

  Liu, Ying ^a   Lou, Jun ^a   Xiao, Kai ^a   Xu, Xiangdong ^a   Hong, Yilin ^a   Fu, Shaojun ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Condenser zone plate; Phase Ronchi grating; Self supporting; Soft x ray; X ray lithography

Indexed keywords

APPROXIMATION THEORY; FABRICATION; INTERFEROMETRY; ION BEAMS; PHOTOLITHOGRAPHY; PLATES (STRUCTURAL COMPONENTS); SCANNING ELECTRON MICROSCOPY; X RAY ANALYSIS; X RAY LITHOGRAPHY;

CONDENSER ZONE PLATES (CZP); PHASE RONCHI GRATING; SELF-SUPPORTING; SOFT X-RAY;

DIFFRACTION GRATINGS;

EID: 19844363125     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.574391     Document Type: Conference Paper

References (12)

1. Vasco Ronchi, "Forty Years of History of a Grating Interferometer," Applied Optics, 3(4) pp. 437-451 (1964)
2. George Vogi, A Phase Interferometer. Applied Optics, 3 pp. 1089 (1964)
3. C. Hou, J. Bai, X. Hou et al, The measurement of long focal length Based on Talbot effect, ACTA OPTICA SINICA, 22(11)pp. 1328-1330 (2002)
4. A. S. Khan, M. S. Tomar and R. S. Kasana, "Ronchi-Grating Interferometer for Measuring the Linear Thermal Expansion Coefficient of the Material of Metallic Bars," J. Optics(Paris), 21 (5)pp. 233-236 (1990)
5. G. Schirripa Spagnolo, D. Ambrosini and D. Paoletti. "Displacement Measurement Using the Talbot Effect with a Ronchi Grating," Journal of Optics: Pure and Applied Optics, 4 pp. 376-380 (2002)
6. S. Fu, Y. Hong, X. Tao and K. Qi, "Fabrication of Phase Ronchi Grating by Ion Beam Etching," Chinese Journal of Quantum Electronics, 12(2), pp. 146-149 (1995)
7. X. Bi, G. Sun, J. Sun et al, Fabrication of Orthogonal Phase Ronchi Grating by Ion Beam Etching, Chinese Journal of Quantum Electronics, 16(4): 371-374 (1999)
8. X. Zhong, The Diffraction and Wavefront Transformation of Light, Higer Education Press, Beijing, 1985, P83
9. G. Schmahl, D. Rudolph, B. Niemann et al, "X-ray microscopy studies," Optik, 93 (3), pp. 95-102(1993)
10. Angelic L. Pearson, Weilun Chao, Gregory Denbeaux et al, "XM-1, the high-resolution soft x-ray microscope at the Advance Source," SPIE, 4146, pp. 54-59 (2000)
11. S. Fu, Fabrication of soft x-ray condenser zone plates, ACTA OPTICA SINICA, 15(8): 1148-1150 (1995)
12. G. Schmahl, D. Rudouph et al., "Zone plates for x-ray microscopy", X-ray Microscopy, edited by G. Schmahl and D. Rudouph, Springer-Verlag, Berlin, 1984, pp. 63-74.