Displacement measurement using the Talbot effect with a Ronchi grating

Journal of Optics A: Pure and Applied Optics

Volumn 4, Issue 6, 2002, Pages

  Schirripa Spagnolo, G ^a   Ambrosini, D ^b   Paoletti, D ^b  

^a ROMA TRE UNIVERSITY   (Italy)

^b UNIVERSITY OF L'AQUILA   (Italy)

Author keywords

Electro optics system; Ronchi grating; Shift measuring; Talbot effect

Indexed keywords

DATA REDUCTION; DIFFRACTION GRATINGS; ELECTROOPTICAL EFFECTS; FOURIER TRANSFORMS; PHASE SHIFT; PROFILOMETRY;

COSINE GRATING; DISPLACEMENT MEASUREMENT; FRESNEL APPROXIMATION; FRESNEL DIFFRACTION PROPERTIES; FRESNEL PROPAGATION; RONCHI GRATING; SHIFT MEASURING; TALBOT EFFECT; TRANSMITTANCE; WAFER SURFACE TOPOLOGY;

DISTANCE MEASUREMENT;

EID: 0036863701     PISSN: 14644258     EISSN: None     Source Type: Journal    
DOI: 10.1088/1464-4258/4/6/383     Document Type: Article

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