Sub-aperture approaches for asphere polishing and metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5638, Issue PART 1, 2005, Pages 284-299

  Tricard, Marc ^a   Dumas, Paul ^a   Forbes, Greg ^a  

^a QED TECHNOLOGIES   (United States)

Author keywords

Aspheric fabrication; Magnetorheological Finishing (MRF); Metrology; Polishing; Stitching interferometry

Indexed keywords

ASPHERICS; COMPUTER SOFTWARE; DATA ACQUISITION; FUSED SILICA; IMAGING TECHNIQUES; MEASUREMENTS; OPTIMIZATION; POLISHING; POLYCRYSTALLINE MATERIALS;

ASPHERIC FABRICATION; MAGNETORHEOLOGICAL FINISHING (MRF); PRISTINE OPTICAL SURFACES; STITCHING INTERFEROMETRY;

INTERFEROMETERS;

EID: 19844362174     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.577539     Document Type: Conference Paper

References (19)

1. Jacobs, S. D., Arrasmith, S. A., Kozhinova, I.A., Gregg, L. L., Shorey, A. B., Romanofsky, H. J., Golini, D., Kordonski, W. I., Dumas, P., and Hogan, S., "An overview of magnetorheological finishing (MRF) for precision optics manufacturing," 101 Annual Meeting of the American Ceramic Society, 1999.
2. Golini, D., Kordonski, W. I., Dumas, P., and Hogan, S., "Magnetorheological finishing (MRF) in commercial precision optics manufacturing," Proc. SPIE Vol. 3782, Optical Manufacturing and Testing III; H. Philip Stahl; Ed. p. 80-91, 1999.
3. Kordonski, W. I., Gorodkin, S. R., and Novikova, Z. A., "The Influence of Ferroparticle Concentration and size on MR Fluid Properties," Electro-Rheological Fluids, Magneto- Rheological Suspensions and their applications, Yonezawa, Japan: World Scientific. 1997.
4. Tricard, M. and Golini, D., "High precision photomask polishing with magneto-rheological finishing (MRF)," Meeting of the American Society for Precision Engineering, Vol. 17, 2002, pp. 120-125, 2002.
5. Golini, D., Schneider, G., Flug, P., and DeMarco, M., "Magnetorheological Finishing," Optics & Photonics News, pp. 20-24, 2001.
6. Golini, D., DeMarco, M., Kordonski, W., and Bruning, J. "MRF Polishes Calcium to High Quality," Optoelectronics World, PennWell Corporation; July 2001.
7. Mulkens, J., McClay, J., Tirri, B., Brunotte, M., Mecking, B., and Jasper, H., "Optical lithography solutions for sub-65 nm semiconductor devices," Proc. SPIE Optical Microlithography XVI, Vol. 5040, pp. 753-762, 2003.
8. Tricard, M., Dumas, P. R., Golini, D., and Mooney, J. T., "Prime silicon and silicon-on-insulator (SOI) wafer polishing with magnetorheological finishing (MRF)," Proc. IMECE '03 2003 ASME International Mechanical Engineering Congress & Exposition, ASME, 2003.
9. Dumas, P., Golini, D., Murphy, P., Tricard, M., "Improve Figure and Finish of Diamond Turned Surfaces with Magneto-Rheological Finishing (MRF)," Proc. ASPE 19th Annual Meeting, October 2004.
10. Dumas, P. et. al., "Flexible Polishing and Metrology Solutions for Free-form Optics," Proc. ASPE Winter Topical Meeting on Free-Form Optics: Design, Fabrication, Metrology, Assembly, Feb. 2004.
11. Stahl, H.P., "Optic Needs for Future Space Telescopes," Proceedings of SPIE, 5180: 1-5, 2004.
12. MacEwen, H. A., "Separation of functions as an approach to development of large space telescope mirrors," Proceedings of SPIE, 5166: 39-48, 2004.
13. Aric Shorey, "Magnetorheological Finishing of large and lightweight optics," Proc. SPIE, Optical Science and Technology, Denver, CO, 2004.
14. Roughness measurements taken using Zygo NewView 5000, 20x magnification, 80 micron high pass filter.
15. P. Murphy, P. Dumas, J. Fleig, G. Forbes, "Stitching interferometry: a flexible solution for surface metrology," OPN Magazine, May 2003.
16. Otsubo, M., Okada, K. and Tsujiuchi, J., "Measurement of large plane surface shapes by connecting small-aperture interferograms," Opt. Eng. 33, 608-613, 1994.
17. Jon Fleig, Paul Dumas, Paul E. Murphy, Greg W. Forbes, "An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces," Proceedings of SPIE Vol. 5188 2003.
18. P. Dumas, J. Fleig, G. Forbes, and P. Murphy, "Extending the range of interferometry through sub-aperture stitching," Optifab 2003, SPIE, May 2003.
19. P. Murphy, P. Dumas, J. Fleig, and G. Forbes, "Novel method for computing reference wave error and comparison to existing methods," Optifab 2003, SPIE, May 2003.