Gravimetric and profilometric measurements of the ablation rates of photosensitive polymers at different wavelengths

Applied Surface Science

Volumn 247, Issue 1-4, 2005, Pages 115-122

  Dumont, Th ^a   Bischofberger, R ^b   Lippert, T ^a   Wokaun, A ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b Applied MicroSWISS GmbH   (Switzerland)

Author keywords

Polyimides; Profilometer; Quartz microbalance

Indexed keywords

GRAVIMETRIC ANALYSIS; LIGHT ABSORPTION; MORPHOLOGY; PHOTOSENSITIVITY; POLYIMIDES; PROFILOMETRY;

MASS LOSS; PHOTOSENSITIVE POLYMERS; QUARTZ MICROBALANCE; TRIAZENE POLYMERS;

LASER ABLATION;

EID: 19744377495     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.01.038     Document Type: Article

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