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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 2 A, 1999, Pages 881-885

Effect of multiply charged ions on the vickers hardness of TiC films

(1) Suzuki, Akira a

a Nihon Seimitsu Co Ltd (Japan)

Author keywords

Arc ion plating; Ionic rate; Multiply charged ion; TiC film

Indexed keywords

EID: 19644396619 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.38.881 Document Type: Article

Times cited : (5)

References (8)

1
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2
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- H. Radhawa and P. C. Johnson: Surf. & Coat. Technol. 31 (1987) 303.
- (1987) Surf. & Coat. Technol. , vol.31 , pp. 303
- Radhawa, H.¹ Johnson, P.C.²

3
- 0025701305
- K. Akari, H. Tamagaki, T. Kumakiri, K. Tsuji, E. S. Koh and C. N. Tai: Surf. & Coat. Technol. 43/44 (1990) 312.
- (1990) Surf. & Coat. Technol. , vol.43-44 , pp. 312
- Akari, K.¹ Tamagaki, H.² Kumakiri, T.³ Tsuji, K.⁴ Koh, E.S.⁵ Tai, C.N.⁶

4
- 33644690659
- U. S. Patent, No. 4673477
- S. Ramalingam, C. B. Qi and K. Kim: U. S. Patent, No. 4673477 (1987).
- (1987)
- Ramalingam, S.¹ Qi, C.B.² Kim, K.³

5
- 0031097928
- A. Suzuki: Jpn. J. Appl. Phys. 36 (1997) 1245.
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 1245
- Suzuki, A.¹

6
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- P. A. Lindfors and W. M. Mularie: Surf. & Coat. Technol. 29 (1986) 275.
- (1986) Surf. & Coat. Technol. , vol.29 , pp. 275
- Lindfors, P.A.¹ Mularie, W.M.²

7
- 0032066170
- A. Suzuki: Jpn. J. Appl. Phys. 37 (1998) 2656.
- (1998) Jpn. J. Appl. Phys. , vol.37 , pp. 2656
- Suzuki, A.¹

8
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- [in Japanese]
- K. Sasaki: Kikai Gijutsu 40 (1992) 89 [in Japanese].
- (1992) Kikai Gijutsu , vol.40 , pp. 89
- Sasaki, K.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.