Multiply charged ions by constant voltage arc ion plating and its applications

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 3 SUPPL. A, 1997, Pages 1245-1249

  Suzuki, Akira ^a  

^a Nihon Seimitsu Co Ltd   (Japan)

Author keywords

Arc ion plating; Cutting tool; Flank wear; Multiply charged ion; TiN film

Indexed keywords

CONSTANT VOLTAGE ARC ION PLATING; FLANK WEAR; MULTIPLY CHARGED IONS;

CUTTING TOOLS; IONS; PLATING; THIN FILMS; TITANIUM NITRIDE; WEAR OF MATERIALS;

FILM GROWTH;

EID: 0031097928     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.1245     Document Type: Article

References (7)

1. H. Takuma: Kotai Butsuri 22 (1987) 809 [in Japanese].
2. C. W. Kimblin: J. Appl. Phys. 44 (1973) 3074.
3. A. Suzuki and K. Ohishi: Proc. Spring Conf. Japan Society for Precision Engineering (1995) p. 875.
4. Butsurigaku Jiten (Physics Dictionary), ed. (Baifukan, Tokyo, 1992) p. 2386 [in Japanese].
5. T. Shibata, K. Ogura and H. Ohba: Shinku 36 (1993) 928 [in Japanese].
6. A. Suzuki and K. Ohishi: Proc. Spring Conf. Japan Society for Precision Engineering (1996) p. 553.
7. K. Okamoto and E. Kamijo: Shinku 30 (1987) 786 [in Japanese].