Nano-mechanical and tribological characteristics of ultra-thin amorphous carbon film investigated by AFM

KSME International Journal

Volumn 18, Issue 10, 2004, Pages 1772-1781

  Chung, Koo Hyun ^a   Lee, Jae Won ^a   Kim, Dae Eun ^a  

^a Yonsei University   (South Korea)

Author keywords

Atomic Force Microscope (AFM); Diamond Coated Tip; Nano indentation; Nano Wear Rate; Scratch Test

Indexed keywords

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; COATING TECHNIQUES; DIAMONDS; INDENTATION; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; TRIBOLOGY; WEAR OF MATERIALS;

DIAMOND COATED TIP; NANO-INDENTATION; NANO-WEAR RATE; SCRATCH TEST;

ULTRATHIN FILMS;

EID: 19644383574     PISSN: 12264865     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02984326     Document Type: Article

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