Research of metal membrane heater

Chinese Journal of Sensors and Actuators

Volumn 17, Issue 4, 2004, Pages 615-618

  Yan, Wei Ping ^a   Zhu, Jian Bo ^a   Ma, Ling Zhi ^a   Du, Li Qun ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Cr and Ni Cr thin film; Micro heater; Micro fluidic sensor; PCR biochip; TCR

Indexed keywords

CHROMIUM; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; HEAT TREATMENT; HIGH TEMPERATURE EFFECTS; NICKEL ALLOYS; SENSORS; SILICON;

CR AND NI-CR THIN FILMS; MICRO HEATERS; MICRO-FLUIDIC SENSORS; PCR BIOCHIPS; TEMPERATURE COEFFICIENT OF RESISTANCE (TCR);

THIN FILMS;

EID: 19544387172     PISSN: 10041699     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

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2. Mo Yapwu, Okawa Yuzo et, al. Micro-machined gas senor array based on metal film micro-heater[J]. Sensors and Actuators B:Chemical. 2001, 79(2- 3): 175-18.
3. Schabmueller C G J, Evans A G R, Brunnschweiler A. Closed chamber PCR-chips for DNA amplification[C]. In: IEE Seminar on Demonstrated Micromachining Technologies for Industry (Ref. No. 00/032), Conference Dates: 29 March, 2000.
4. Lao, Alex I. K. Precise temperature control of micro fluidic chamber for gas and liquid phase reactions[J]. Sensors and Actuators A: Physical, 2000, 84: 11-17.