Time-Resolved 1.5 μm-Band Photoluminescence of Highly Oriented β-FeSi2 Films Prepared by Magnetron-Sputtering Deposition

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 43, Issue 2 A, 2004, Pages

  Chu, Shucheng ^a   Hirohada, Toru ^a   Kuwabara, Masakazu ^a   Kan, Hirofumi ^a   Hiruma, Teruo ^a  

^a CENTRAL RESEARCH LABORATORY   (Japan)

Author keywords

Film; Magnetron sputtering; Suicide; Time resolved photoluminescence; FeSi2

Indexed keywords

CARRIER CONCENTRATION; EPITAXIAL GROWTH; MAGNETRON SPUTTERING; PHOTOLUMINESCENCE; PHOTOMULTIPLIERS; QUARTZ; QUENCHING; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

FILM; SILICIDE; TIME-RESOLVED PHOTOLUMINESCENCE; Β-FESI2;

IRON COMPOUNDS;

EID: 1942539885     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.43.l127     Document Type: Article

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