Micro, internal-combustion engine fabrication with 900 μm deep features via DRIE

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 5, Issue , 2003, Pages 115-123

  Knobloch, Aaron J ^a   Wasilik, Matt ^a   Fernandez Pello, Carlos ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GEARS; MASKS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; REACTIVE ION ETCHING; ROTORS; SILICON; SURFACE ROUGHNESS;

EPITROCHOID HOUSING; MASK SELECTIVITY; MICROFABRICATION;

INTERNAL COMBUSTION ENGINES;

EID: 1942520322     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2003-42558     Document Type: Conference Paper

References (10)

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