Grating efficiencies comparison study: Calculations versus metrology for various types of high groove density gratings at VUV-UV wavelengths

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5178, Issue , 2004, Pages 267-277

  Kuznetsov, Ivan G ^a,c   Wilkinson, Erik ^b,d   Content, David A ^c   Boucarut, Rene A ^c   Madison, Timothy J ^c  

^a HUGHES STX CORPORATION   (United States)

^b Astrophysics Research Laboratory   (United States)

^c NASA GODDARD SPACE FLIGHT CENTER   (United States)

^d UNIVERSITY OF COLORADO   (United States)

Author keywords

Atomic force microscope; COS; Efficiency model; Grating efficiency; Groove profile; MAMA detector; Multi layer coating; Scatterometer; UV VUV grating; Wavelength scaling

Indexed keywords

COS; EFFICIENCY MODELS; GRATING EFFICIENCY; GROOVE PROFILE; MAMA DETECTORS; MULTI-LAYER COATINGS; UV-VUV GRATING; WAVELENGTH SCALING;

ATOMIC FORCE MICROSCOPY; COATINGS; DATA REDUCTION; HOLOGRAPHY; LIGHT SCATTERING; OXIDATION; ULTRAVIOLET RADIATION;

DIFFRACTION GRATINGS;

EID: 1942518749     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.507946     Document Type: Conference Paper

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