Characterization of balloon-jointed micro-fingers

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 5, Issue , 2003, Pages 311-316

  Lu, Yenwen ^a   Kim, Chang Jin ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; ELASTIC MODULI; ELECTRIC MOTORS; ELECTRIC POWER SYSTEMS; ENERGY EFFICIENCY; MICROACTUATORS; ROBOTICS; ROBUSTNESS (CONTROL SYSTEMS); ROTATION; STIFFNESS; THIN FILMS;

MICRO BALLOON JOINTS; MICRO-FINGER STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 1942488203     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2003-41326     Document Type: Conference Paper

References (13)

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12. Parylene related information is obtained from http://www.scscookson.com/ parylene/
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