Variable structure control of a piezoelectric actuator for a scanning tunneling microscope

IEEE Transactions on Industrial Electronics

Volumn 51, Issue 2, 2004, Pages 354-363

  Bonnail, Nicolas ^a   Tonneau, Didier ^a   Jandard, Franck ^a   Capolino, Gérard André ^b   Dallaporta, Hervé ^a  

^a AIX MARSEILLE UNIVERSITY   (France)

^b UNIVERSITÉ DE PICARDIE JULES VERNE   (France)

Author keywords

Acoustic motors; Command and control systems; Microscopy; Modeling; Motion control; Motion measurement; Tunneling; Variable structure systems

Indexed keywords

ACOUSTIC EQUIPMENT; COMMAND AND CONTROL SYSTEMS; FEEDBACK; MOTION CONTROL; MOTORS; PIEZOELECTRIC DEVICES; SCANNING TUNNELING MICROSCOPY; SLIDING MODE CONTROL; TWO TERM CONTROL SYSTEMS;

ACOUSTIC MOTORS; MOTION MEASUREMENT; PIEZOELECTRIC ACTUATOR; SCANNING TUNNELING MICROSCOPE; VARIABLE STRUCTURE CONTROL;

ACTUATORS;

EID: 1942455340     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2004.825266     Document Type: Article

References (13)

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