Spatial distribution of strain and phases in Si nano-indentation analysed by Raman mapping

Solid State Phenomena

Volumn 82-84, Issue , 2002, Pages 777-782

  Demangeot, F ^a   Puech, P ^a   Paillard, V ^a   Domnich, V ^a   Gogotsi, Y G ^a  

^a UNIVERSITÉ PAUL SABATIER   (France)

Author keywords

Metastable phases; Raman mapping; Si nano indentation; Strain

Indexed keywords

AMORPHOUS SILICON; CRYSTAL LATTICES; CRYSTALLINE MATERIALS; ELECTRON ENERGY LEVELS; ELECTRON TRANSITIONS; PHONONS; PHOTONS; RAMAN SCATTERING;

METASTABLE PHASES; RAMAN MAPPING; SILICON NANO-INDENTATION;

SILICON WAFERS;

EID: 19244386119     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (11)