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Microlithography World
Volumn 13, Issue 3, 2004, Pages
Modeling of immersion lithography for OPC
Author keywords

[No Author keywords available]
Indexed keywords

IMMERSION LITHOGRAPHY; LIQUID IMMERSION OPTICS; OPTICAL PROXIMITY CORRECTION;
EID: 19244366149     PISSN: 1074407X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article
Times cited : (3)
References (7)
  • 1
    • 2942676843 scopus 로고    scopus 로고
    • Polarization effects in immersion lithography
    • to be published in
    • K. Adam, W. Maurer, "Polarization Effects in Immersion Lithography," Proc. SPIE, Vol. 5377, to be published in 2004.
    • (2004) Proc. SPIE , vol.5377
    • Adam, K.1    Maurer, W.2
  • 2
    • 3843124140 scopus 로고    scopus 로고
    • Extending optical lithography with immersion
    • to be published in
    • B. Streefkerk, et al., "Extending Optical Lithography with Immersion," Proc. SPIE, Vol. 5377, to be published in 2004.
    • (2004) Proc. SPIE , vol.5377
    • Streefkerk, B.1
  • 3
    • 0001297191 scopus 로고
    • Extending scalar aerial image calculations to higher numerical apertures
    • Nov/Dec
    • D.C. Cole, E. Barouch, U. Hollerbach, S.A. Orszag, "Extending Scalar Aerial Image Calculations to Higher Numerical Apertures," J. Vac. Sci. Technol. B, Vol. 10(6), pp. 3037-3041, Nov/Dec 1992.
    • (1992) J. Vac. Sci. Technol. B , vol.10 , Issue.6 , pp. 3037-3041
    • Cole, D.C.1    Barouch, E.2    Hollerbach, U.3    Orszag, S.A.4
  • 4
    • 85076260894 scopus 로고
    • Extension of the Hopkins theory of partially coherent imaging to include thin-film interference effects
    • M. S. Yeung, D. Lee, R. Lee, A.R. Neureuther, "Extension of the Hopkins Theory of Partially Coherent Imaging to Include Thin-Film Interference Effects," Proc. SPIE, Vol. 1927, pp. 452-463, 1993.
    • (1993) Proc. SPIE , vol.1927 , pp. 452-463
    • Yeung, M.S.1    Lee, D.2    Lee, R.3    Neureuther, A.R.4
  • 5
    • 0001846054 scopus 로고    scopus 로고
    • Theory of high-NA imaging in homogeneous thin films
    • D.G. Flagello, T. Milster, A.E. Rosenbluth, "Theory of High-NA Imaging in Homogeneous Thin Films," J. Opt. Soc. Am. A, Vol. 13(1), pp. 53-64, 1996.
    • (1996) J. Opt. Soc. Am. A , vol.13 , Issue.1 , pp. 53-64
    • Flagello, D.G.1    Milster, T.2    Rosenbluth, A.E.3
  • 6
    • 0141610839 scopus 로고    scopus 로고
    • Improved modeling performance with an adapted vectorial formulation of the Hopkins imaging equations
    • K. Adam, Y. Granik, A. Torres, N. Cobb, "Improved Modeling Performance with an Adapted Vectorial Formulation of the Hopkins Imaging Equations," Proc. SPIE, Vol. 5040, pp. 78-91, 2003.
    • (2003) Proc. SPIE , vol.5040 , pp. 78-91
    • Adam, K.1    Granik, Y.2    Torres, A.3    Cobb, N.4
  • 7
    • 0029226739 scopus 로고
    • Fast low complexity mask design
    • N. Cobb, A. Zakhor, "Fast, Low Complexity Mask Design," Proc. SPIE, Vol. 2440, pp. 313-327, 1995.
    • (1995) Proc. SPIE , vol.2440 , pp. 313-327
    • Cobb, N.1    Zakhor, A.2

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.