Influence of the temperature of a titanium target during magnetron sputtering in argon-nitrogen reactive plasmas

Vide: Science, Technique et Applications

Volumn , Issue 291 SUPPL.2, 1999, Pages 90-91

  Mercs, D ^a   Perry, F ^a   Pigeat, P ^a   Billard, A ^a   Frantz, C ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 18944386538     PISSN: 12660167     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)

1. D. Mercs, F. Lapostolle, F. Perry, A. Billard, C. Frantz, accepted in Surf. Coat. Technol. (1999)
2. R.Y. Chau, W.S. Ho, J.C. Wolf, D.L. Licon, Thin Solid Films, 287 (1996), 57
3. S.M. Rossnagel, Mat. Sci. Eng. A, 140 (1991), 510
4. F. Sanchette, T. Czerwiec, A. Billard, C. Frantz, Surf. Coat. Technol., 96 (1997), 184