SCOPUS 정보 검색 플랫폼

Volumn 174-175, Issue , 2003, Pages 928-932

Diagnostics of a hexamethyldisiloxane/oxygen deposition plasma

Author keywords

Cavity ringdown spectroscopy; Fourier transform infrared spectroscopy; Hexamethyldisiloxane

Indexed keywords

DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; METHANE; MICROWAVES; OXIDATION; SLOT ANTENNAS;

OXIDATION CHANNELS;

PLASMA DIAGNOSTICS;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 0041326580 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00330-X Document Type: Article

Times cited : (29)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.