Opportunities and integration challenges for CMOS-compatible silicon photonic and optoelectronic devices

2004 1st IEEE International Conference on Group IV Photonics

Volumn , Issue , 2004, Pages 1-3

  Salib, Mike ^a   Morse, Mike ^a   Paniccia, Mario ^a  

^a INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; ELECTRIC POTENTIAL; ELECTRONIC EQUIPMENT; INTEGRATED OPTICS; OPTOELECTRONIC DEVICES; PHOTODETECTORS; SILICON; THERMAL EXPANSION;

CARBON-DOPED OXIDE (CDO); CRITICAL DIMENSION (CD); DEPTH OF FOCUS (DOF); INTERLAYER DIELECTRIC (ILD); MONOLITHIC INTEGRATION;

CMOS INTEGRATED CIRCUITS;

EID: 18844457896     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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3. L Pavesi, L Dal Negro, G Mazzoleni, G Franzò and F Priolo, 'Optical gain in silicon nano-crsytals', Nature, 408, 440-444, 2000.
4. W L Ng, M A Lorenço, R M Gwilliam, S Ledain, G Shao, and K P Homewood, 'An efficient room-temperature silicon-based light emitting diode', Nature, 410, 192-194, 2001.
5. M. Paniccia, M. Morse, M. Salib, 'Silicon Photonics', ed. By L. Pavesi, D.J. Lockwood (Springer, Berlin 2004) p 51
6. P.K. Tien, Applied Optics 10, 2395-2419 (1971)