TCAD tools for efficient 3D simulations of geometry effects in floating-gate structures

Proceedings 2004 Non-Volatile Memory Technology Symposium, NVMTS 2004

Volumn , Issue , 2004, Pages 77-82

  Saad, Y ^a   Tavernier, C ^a   Ciappa, M ^b   Fichtner, W ^b  

^a SYNOPSYS SWITZERLAND LLC   (Switzerland)

^b ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER SIMULATION; DATA STORAGE EQUIPMENT; GEOMETRY; MULTILAYERS; OPTIMIZATION; POLYSILICON; PROBLEM SOLVING;

COMPLEX GEOMETRY; EMULATORS; FLOATING-GATE STRUCTURES; GEOMETRY EFFECTS;

COMPUTER AIDED DESIGN;

EID: 18844397014     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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