Structural characterization of a-Si:C:H alloys prepared by dc sputtering

Journal of Non-Crystalline Solids

Volumn 299-302, Issue PART 2, 2002, Pages 891-895

  Saleh, R ^a   Munisa, L ^a   Beyer, W ^b  

^a UNIVERSITY OF INDONESIA   (Indonesia)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; DIFFUSION; INERT GASES; MICROSTRUCTURE; SECONDARY ION MASS SPECTROMETRY; SPUTTERING;

EFFUSION MEASUREMENTS;

SILICON ALLOYS;

EID: 18744420154     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)00989-9     Document Type: Article

References (10)