Versatile force-feedback manipulator for nanotechnology applications

Review of Scientific Instruments

Volumn 76, Issue 5, 2005, Pages

  Jobin, Marc ^a,b,c   Foschia, Raphael ^a,b   Grange, Śbastien ^a   Baur, Charles ^a   Gremaud, Ǵrard ^a   Lee, Kyumin ^a   Forró, Laszlo ^a   Kulik, Andrzej ^a  

^a EPFL   (Switzerland)

^b NanoFeel   (Switzerland)

^c University of Applied Science   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPE; CONTACT-MODE NANOMANIPULATION; FEEDBACK HAPTIC DEVICES; TIP-SAMPLE INTERACTION;

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; DYNAMIC MECHANICAL ANALYSIS; ELECTRODES; FRICTION; LITHOGRAPHY; NANOTECHNOLOGY; OPTIMIZATION; SILICON;

MANIPULATORS;

EID: 18744391405     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1891346     Document Type: Article

References (14)

1. A. D. Mehta, M. Rief, J. Spudich, D. Smith, and R. Simmons, Science 0036-8075 5408, 1698 (1999). For a review, see A. Ashkin, IEEE J. Sel. Top. Quantum Electron. 6, 841 (2000).
2. A. D. Mehta, M. Rief, J. Spudich, D. Smith, and R. Simmons, Science 0036-8075 5408, 1698 (1999). For a review, see A. Ashkin, IEEE J. Sel. Top. Quantum Electron. 6, 841 (2000).
3. T. Thorsen, S. J. Maerkl, and S. R. Quake, Science 298, 580 (2002).
4. J. Lekki, S. Kumar, S. Parihar, S. Grange, C. Baur, R. Foschia, and A. Kulik, Rev. Sci. Instrum. 75, 4646 (2004).
5. P. Boggild, T. Hansen, C. Tanasa, and F. Grey, Nanotechnology 12, 331 (2001).
6. M. F. Crommie, C. P. Lutz, and D. M. Eigler, Science 262, 218 (1993).
7. S. J. Tans, A. R. M. Verschueren, and C. Dekker, Nature (London) 393, 49 (1998).
8. J. P. Salvetat, J. M. Bonard, N. H. Thomson, A. J. Kulik, L. Forro, W. Benoit, and L. Zuppiroli, Appl. Phys. A: Mater. Sci. Process. 69, 255 (1999).
9. F. Falvo, R. Superfine, S. Washburn, M. Finch, R. Taylor, V. Chi, and F. Brooks, Computer Graphics (ACM SIGGRAPH, New York, 1995), pp. 123-118.
10. M. Jobin, R. Foschia, and A. Kulik, AIP Conf. Proc. 696, 223 (2003).
11. Swiss Patent No. CH 672 089.
12. M. Falvo, G. Clary, R. Taylor II, V. Chi, F. Brooks, S. Washburn, and R. Superfine, Nature (London) 389, 582 (1997).
13. J. W. Seo, New J. Phys. 5, 120 (2003).
14. P. Umek, AIP Conf. Proc. 723, 427 (2004).