Data coding tools for color-coded vector nanolithography

Review of Scientific Instruments

Volumn 75, Issue 11, 2004, Pages 4646-4650

  Lekki, Janusz ^a   Kumar, Saveen ^b   Parihar, Sunil S ^b   Grange, Sebastien ^b   Baur, Charles ^b   Foschia, Raphael ^b   Kulik, Andrzej ^b  

^a INSTITUTE OF NUCLEAR PHYSICS   (Poland)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COLOR; DATA ACQUISITION; ELECTRIC POTENTIAL; PARAMETER ESTIMATION; POLYMERS; PRODUCT DESIGN; SIGNAL ENCODING; VECTORS;

COLOR-CODED VECTORS; DATA CODING TOOLS; DATA FORMAT; PARAMETER CODING SCHEME;

NANOTECHNOLOGY;

EID: 10844276272     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1805014     Document Type: Article

References (11)

1. M. Wendel, B. Irmer, J. Cortes, R. Kaiser, H. Lorenz, J. P. Kotthaus, A. Lorke, and E. Williams, Superlattices Microstruct. 20, 349 (1996).
2. E. Dubois and J.-L. Bubbendor, Solid-State Electron. 43, 1085 (1999).
3. Z. J. Davis, G. Abadal, O. Hansen, X. Borise, N. Barniol, F. Perez-Murano, and A. Boisen, Ultramicroscopy 97, 467 (2003).
4. S. Gwo, J. Phys. Chem. Solids 62, 1673 (2001).
5. R. Held, T. Heinzel, P. Studerus, and K. Ensslin, Physica E (Amsterdam) 2, 748 (1998).
6. Ph. Avouris, R. Martel, T. Hertel, and R. Sandstrom, Appl. Phys. A: Mater. Sci. Process. 66, S659 (1998).
7. S. Cruchon-Dupeyrat, S. Porthun, and G. Y. Liu, Nanofabrication using Computer-assisted Design and Automated Vector-scanning Probe Lithography (Elsevier, New York, 2001).
8. B. Klehn and U. Kunze, J. Appl. Phys. 85, 3897 (1999).
9. M. Heyde, K. Rademann, B. Cappella, M. Geuss, H. Sturm, T. Spangenberg, and H. Niehus, Rev. Sci. Instrum. 72, 136 (2001).
10. Microsoft articles Q66949, 145999, Q81497, 90291, http://support.microsoft.com
11. M. Su and V. P. Dravid, Appl. Phys. Lett. 80, 4434 (2002).