Synchrotron beamline for extreme-ultraviolet multilayer mirror endurance testing

Review of Scientific Instruments

Volumn 76, Issue 5, 2005, Pages

  Tarrio, C ^a   Grantham, S ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MIRROR SURFACES; MULTILAYER MIRRORS; SYNCHROTON BEAMLINE; VACUUM SEAL;

CARBON; DEGRADATION; DEPOSITION; ELECTROMAGNETIC WAVE REFLECTION; PHOTOLITHOGRAPHY; SURFACE PHENOMENA; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION; VACUUM APPLICATIONS;

MIRRORS;

EID: 18744381014     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1896225     Document Type: Article

References (5)

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3. S. A. Bajt, Appl. Opt. 42, 5750 (2003).
4. K. Boller, R.-P. Haelbich, H. Hogrefe, W. Jark, and C. Kunz, Nucl. Instrum. Methods Phys. Res. 208, 273 (1983).
5. See, for example, S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. Spiller, Opt. Eng. (Bellingham) 41, 1797 (2002).