Ion-beam-induced nanosmoothening and conductivity enhancement in ultrathin metal films

Applied Physics Letters

Volumn 86, Issue 6, 2005, Pages 1-3

  Mitra, Partha ^a   Hebard, Arthur F ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVITY ENHANCEMENT; IN SITU; NANOSMOOTHENING; SHUNT RESISTANCE;

COPPER; DEPOSITION; ELECTRIC CONDUCTANCE; ION BEAMS; ION BOMBARDMENT; SURFACE PROPERTIES; SURFACE TOPOGRAPHY; SURFACE TREATMENT; ULTRATHIN FILMS;

IRON;

EID: 18644385939     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1861953     Document Type: Article

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