Nanoscale fabrication using single-ion impacts

Smart Materials and Structures

Volumn 11, Issue 5, 2002, Pages 686-690

  Millar, Victoria ^a   Pakes, Chris I ^a   Cimmino, Alberto ^a   Brett, David ^a   Jamieson, David N ^a   Prawer, Steven ^a   Yang, Changyi J ^a   Rout, B ^a   McKinnon, Rita P ^a,b   Dzurak, Andrew S ^a,b   Clark, Robert G ^a,b  

^a UNIVERSITY OF MELBOURNE   (Australia)

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; CHEMICAL MODIFICATION; HELIUM; ION IMPLANTATION; NANOSTRUCTURED MATERIALS; PHOTORESISTS; POLYMETHYL METHACRYLATES; QUANTUM THEORY; SEMICONDUCTING SILICON;

QUANTUM COMPUTERS;

MICROELECTRONIC PROCESSING;

EID: 18644362236     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/11/5/310     Document Type: Article

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