Plasma-deposited parylene-like thin films: Process and material properties

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 124-130

  Mitu, B ^a   Bauer Gogonea, S ^b   Leonhartsberger, H ^b   Lindner, M ^b   Bauer, S ^b   Dinescu, G ^a  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

^b JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

Parylene; Plasma polymerization; Thin films

Indexed keywords

COMPOSITION; ELECTRODES; HYDROGENATION; SPECTROSCOPIC ANALYSIS; SUBLIMATION;

CARBON-LIKE FILMS;

PLASTIC FILMS;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 18544409090     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00329-3     Document Type: Article

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