Knowledge-based software system for fast yield loss detection in a semiconductor fab

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3216, Issue , 1997, Pages 88-101

  Martín, Victorino ^a   Recio, Miguel ^a   Merino, Miguel A ^a   Moreno, Julian ^a   Fernández, Almudena ^a   González, Gerardo ^a   Guillermo Sanchez ^a   Barrios, Luis J ^b   Del Castillo, Maria D ^b   Lemus, Lissette ^b   González, Angel L ^b  

^a NOKIA RESEARCH CENTER   (United States)

^b Consejo Superior de Investigaciones Científicas   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE; ELECTRIC CONDUCTIVITY; FAILURE ANALYSIS; KNOWLEDGE BASED SYSTEMS; QUALITY ASSURANCE; RELIABILITY ANALYSIS; SAFETY FACTOR; SEMICONDUCTOR MATERIALS;

ADVANCED SOFTWARES; AUTOMATIC MODES; BASE-LINES; COMPARATIVE ANALYSIS; KNOWLEDGE-BASED; SEMICONDUCTOR FAB; SINGLE STEPS; SOFTWARE SYSTEMS; TEST DATUMS; YIELD IMPROVEMENTS; YIELD LOSSES;

RELIABILITY;

EID: 18544374346     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284691     Document Type: Conference Paper

References (2)

1. S.P. Cunningham, C.J. Spanos and K. Voros "Semiconductor Yield Improvement: Results and Best Practices", IEEE(Trans. On Semic. Manuf.) vol. 8, No 2, pp. 103-109. May 1995
2. M. Recio, A. Fernandez, V. Martin, M.J. Pemán, G. Gonzalez, J.R. Hoyer, S. Withlock, D. James and M. Hansen "Advanced Software System for Yield Improvement on Manufacturing Fab" Proceedings of 1996 SPIE Microelectronic Manufacturing Symposium, vol. 2874, pp. 219-229, 1996