Advanced software system for yield improvement on manufacturing fab

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2874, Issue , 1996, Pages 219-229

  Recio, Miguel ^a   Fernandez, Almudena ^a   Martin, Victorino ^a   Peman, Maria J ^a   Gonzalez, Gerardo ^a   Hoyer, J R ^a   Whitlock, Steve ^a   James, David ^a   Hausen, Mark ^a  

^a Lucent Technologies Madrid Tres   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

YIELD IMPROVEMENT;

DATA ACQUISITION; DATA PROCESSING; FABRICATION; KNOWLEDGE BASED SYSTEMS; OPTIMIZATION; SEMICONDUCTOR DEVICE MANUFACTURE;

COMPUTER SOFTWARE;

EID: 0030401228     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)