Deposition of Zr-ZrOX and Y-YXOY films by reactive magnetron sputtering

Vacuum

Volumn 78, Issue 2-4, 2005, Pages 395-399

  Laurikaitis, M ^a   Cyviene J ^a   Dudonis, J ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Reactive magnetron sputtering; Yttrium; Zirconia; Zirconium

Indexed keywords

DEPOSITION; ELECTRON BEAMS; MAGNETRON SPUTTERING; PULSED LASER DEPOSITION; SOL-GELS; X RAY DIFFRACTION ANALYSIS; YTTRIUM COMPOUNDS;

ELECTRON BEAM EVAPORATION; REACTIVE MAGNETRON SPUTTERING; SOL-GEL PROCESSING; TARGET TEMPERATURE;

ZIRCONIA;

EID: 18444399653     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.01.056     Document Type: Conference Paper

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