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Volumn 184, Issue 1, 2001, Pages 51-78
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Optical characterization of porous materials
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTALLINE MATERIALS;
DIELECTRIC PROPERTIES OF SOLIDS;
ELECTROCHEMISTRY;
ELLIPSOMETRY;
ETCHING;
NANOSTRUCTURED MATERIALS;
POROSITY;
SPECTROSCOPIC ANALYSIS;
ELECTROCHEMICAL ETCHING;
SPECTROSCOPIC ELLIPSOMETRY;
POROUS SILICON;
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EID: 0035275973
PISSN: 00318965
EISSN: None
Source Type: Journal
DOI: 10.1002/1521-396X(200103)184:1<51::AID-PSSA51>3.0.CO;2-Q Document Type: Article |
Times cited : (21)
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References (12)
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