Design and efficiency characterization of diffraction gratings for applications in synchrotron monochromators by electromagnetic methods and its comparison with measurement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3150, Issue , 1997, Pages 137-147

  Kleemann, Bernd H ^a   Gatzke, Johannes ^b   Jung, Christian ^c   Nelles, Bruno ^d  

^a Berlin Institute of Optics (BIFO)   (Germany)

^b MAX BORN INSTITUT   (Germany)

^c HAHN MEITNER INSTITUT   (Germany)

^d CARL ZEISS SMT AG   (Germany)

Author keywords

Boundary integral method; Comparison with measurement; Differential method; Electromagnetic diffraction theory; Synchrotron monochromators; XUV grating efficiencies

Indexed keywords

DIFFRACTION; DIFFRACTION GRATINGS; ELECTROMAGNETIC WAVES; ELECTROMAGNETISM; MAGNETIC MATERIALS; NUMERICAL METHODS; PROGRAMMING THEORY; SYNCHROTRON RADIATION; SYNCHROTRONS;

BOUNDARY INTEGRAL METHOD; COMPARISON WITH MEASUREMENT; DIFFERENTIAL METHOD; ELECTROMAGNETIC DIFFRACTION THEORY; SYNCHROTRON MONOCHROMATORS; XUV GRATING EFFICIENCIES;

MONOCHROMATORS;

EID: 1842827302     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.283976     Document Type: Conference Paper

References (13)

1. B. H. Kleemann, A. Mitreiter, and F. Wyrowski, "Integral equation method with parametrization of grating profile - theory and experiments" , J. mod. Opt. 43, No. 7, pp. 1323-1349, 1996.
2. LUMNAB program by M. Nevière, CNRS Marseille.
3. M. Nevière, P. Vincent, and R. Petit, "Sur la theorie du reseau conducteur et ses applications a l'optique", Nouv. Rev. Opt. 5, No. 2, pp. 65-77, 1974.
4. Calculation of grating efficiency, included in: F. Schäfers, Software codes RAY and REFLEC at BESSY, BESSY Technical Report 202/96, Berlin 1996.
5. A. Pomp, B. Kleemann, and J. Creutziger, "Beschreibung des Programmpaketes DACOTA" , internal report of the Karl-Weierstraß- Institute Berlin/Carl Zeiss Jena, 1986.
6. D. Maystre, "Integral methods" , in: R. Petit (Ed.), Electromagnetic theory of gratings, Springer, Berlin 1980.
7. A. Pomp, "The integral method for coated gratings: computational cost" , J. Mod. Opt. 38, pp. 109-120, 1991.
8. M. Davidson, B. H. Kleemann, and J. Bischoff, "A comparison between rigorous light scattering methods", Proc. SPIE Optical Microlithography X 3051, 1997.
9. M. Davidson, "Analytic waveguide solutions and the coherence probe microscope", Proceedings Microcircuit Engineering 90, Leuven, Belgium, Sep. 1990.
10. B. Kleemann and R. Güther, "Metal gratings with dielectric coating of variable thickness", J. Mod. Opt. 38, pp. 897-910, 1991.
11. B. Kleemann and R. Güther, "Phases of diffracted light for reflection and transmission gratings", J. Mod. Opt. 40, pp. 575-589, 1993.
12. H. Petersen, Ch. Jung, C. Helwig, W. B. Peatman, and W. Gudat, "Review of plane grating focusing for soft x-ray monochromators", Rev. Sci. Instrum. 66, pp. 1-14, 1995.
13. K. J. S. Sawhney, C. Hellwig, Ch. Jung, I. Packe, and F. Schäfers, "Efficiency of plane gratings: theory and reality", BESSY Jahresbericht, pp. 503-505, 1995.