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Volumn 180-181, Issue , 2004, Pages 275-279

Correlation between mechanical and electrical properties of silicon oxide deposited by PECVD-TEOS at low temperature

Author keywords

Coating; Mechanical and electric properties; Silicon oxide; Thin films

Indexed keywords

ADSORPTION; CORRELATION METHODS; PERMITTIVITY; THIN FILMS;

OXYGEN PLASMAS;

SILICA;

COATING;

EID: 1842815823 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.10.069 Document Type: Article

Times cited : (12)

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