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Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 488-495

Study of the optical properties of AlN/ZrN/AlN low-e coating

(4) Del Re, M a Gouttebaron, R a Dauchot, J P a Hecq, M a

a UNIVERSITY OF MONS (Belgium)

Author keywords

Low e coating; Magnetron sputtering; Nitride; X ray photoelectron spectroscopy

Indexed keywords

ALUMINUM COMPOUNDS; ANNEALING; BOROSILICATE GLASS; DEPOSITION; FILM GROWTH; INFRARED RADIATION; LIGHT REFLECTION; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM COMPOUNDS;

BIAS VOLTAGE;

MULTILAYERS;

OPTICAL FEATURE;

EID: 1842732047 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.10.093 Document Type: Article

Times cited : (24)

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