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Volumn 363, Issue 4, 1999, Pages 333-338

Analytical performance of a radiofrequency-powered glow discharge excitation source associated with bias voltage modulation

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[No Author keywords available]

Indexed keywords


EID: 0000392062     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: 10.1007/s002160051199     Document Type: Article
Times cited : (17)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.