Surface Topographic Measurement Using Piezo-Electrical PVDF Film Stylus

IEEJ Transactions on Electronics, Information and Systems

Volumn 123, Issue 3, 2003, Pages 505-510

  Huang, Qiangxian ^a   Halsuzawa, Takeshi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

lapping stylus; profilomctry; PVDF; SPM

Indexed keywords

EID: 1842600842     PISSN: 03854221     EISSN: 13488155     Source Type: Journal    
DOI: 10.1541/ieejeiss.123.505     Document Type: Article

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