In-process measurements of material removal in fluid jet polishing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4778, Issue , 2002, Pages 243-250

  Van Brug, Hedser ^a   Groeneveld, Mietta ^a   Booij, Silvia M ^a   Braat, Joseph J M ^a  

^a TNO   (Netherlands)

Author keywords

In process; Interferometry; Optical fabrication; Polishing; Temporal phase unwrapping

Indexed keywords

INTERFEROMETRY; MATHEMATICAL MODELS; POLISHING; SURFACE ROUGHNESS;

FLUID JET POLISHING (FJP);

JETS;

EID: 0036424926     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.473566     Document Type: Conference Paper

References (7)

1. R.M. van der Bijl, O.W. Fänhnle, and H. van Brug, "Subsurface damage measurements as a tool for process monitoring," in Proceedings of the ASPE 1999 annual meeting, 20, pp. 606-609, 1999.
2. O.W. Fähnle, H. van Brug, and H.J. Frankena, "Fluid jet polishing of optical surfaces," Appl. Opt. 37(28), pp. 6771-6773, 1998.
3. S.M. Booij, H. van Brug, and O.W. Fähnle, "A mathematical model for machining spot in Fluid Jet Polishing," in Optical Fabrication and Testing, A. Lindquist, ed., Technical Digest Series, pp. 70-72, OSA, 2000.
4. H. van Brug, "Temporal phase unwrapping and its application in shearography systems," Appl. Opt. 37(28), pp. 6701-6706, 1998.
5. J.M. Huntley and H. Saldner, "Temporal phase-unwrapping algorithm for automated interferogram analysis," Applied Optics 32, pp. 3047-3052, 1993.
6. H. van Brug and P.A.A.M. Somers, "Temporal phase unwrapping with two or four images per time frame: a comparison," in Interferometry '99: Techniques and Technologies, International conference on optical metrology, M. Kujawinska and M. Takeda, eds., 3744, pp. 358-365, SPIE, 1999.
7. P.A.A.M. Somers and H. van Brug, "A single camera, dual image real-time-phase-stepped shearing speckle interferometer," in Fringe 2001, W. Osten and W. Jüptner, eds., pp. 573-580, Elsevier, 2001.