Applicability of iTIRM for roughness reduction monitoring

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4451, Issue , 2001, Pages 340-344

  Van der Bijl, Robert Jaap M ^a   Van Brug, Hedser ^a   Fähnle, Oliver W ^a   Braat, Joseph J M ^a  

^a TNO   (Netherlands)

Author keywords

In situ monitoring; Optical fabrication; Roughness

Indexed keywords

GRINDING (MACHINING); HELIUM NEON LASERS; LASER BEAMS; LIGHT REFLECTION; LIGHT TRANSMISSION; MONITORING; POLISHING; PROFILOMETRY; SURFACE ROUGHNESS;

INTENSITY-DETECTING TOTAL INTERNAL REFLECTION MICROSCOPY; OPTICAL FABRICATION; PROFILOMETER;

OPTICAL MICROSCOPY;

EID: 0035761777     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.453632     Document Type: Conference Paper

References (3)

1. R. M. van der Bijl, O. W. Fähnle, and H van Brug "Subsurface Damage Measurements as a Tool for Process Monitoring," Proceedings of ASPE 1999 Annual Meeting, 20, 606-609, American Society for Precision Engineering, Raleigh, NC, 1999.
2. P. Temple, "Total Internal Reflection Microscopy: A Surface Inspection Technique," Appl. Opt., 20, 2656-2664, 1981.
3. Robert-Jaap M. van der Bijl, Oliver W. Fähnle, Hedser van Brug, and Joseph J. M. Braat, "In-process monitoring of grinding and polishing of optical surfaces," Appl. Opt., 39, 3300-3303, 2000.