Characterization of diamond-like carbon (DLC) films deposited by a magnetron-sputter-type negative ion source (MSNIS)

Applied Surface Science

Volumn 226, Issue 4, 2004, Pages 412-421

  Paik, Namwoong ^a  

^a Plasmion Corporation   (United States)

Author keywords

Diamond like carbon; Morphology; MSNIS

Indexed keywords

ATOMIC FORCE MICROSCOPY; COATINGS; FRICTION; ION BEAMS; KINETIC ENERGY; MAGNETRON SPUTTERING; MORPHOLOGY; NEGATIVE IONS; RAMAN SCATTERING; SURFACE ROUGHNESS; ULTRATHIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND-LIKE CARBON; MAGNETRON-SPUTTER-TYPE NEGATIVE ION SOURCE (MSNIS);

DIAMOND LIKE CARBON FILMS;

EID: 1842527546     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2003.10.047     Document Type: Article

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