Study of thermal oxidation of LaSix/Si(1 0 0) by grazing incidence electron-induced X-ray emission spectroscopy

Journal of Electron Spectroscopy and Related Phenomena

Volumn 135, Issue 1, 2004, Pages 47-52

  Kashiwakura, T ^a   Nakai, S ^a  

^a UTSUNOMIYA UNIVERSITY   (Japan)

Author keywords

Grazing incidence; La; Si K ; Silicate; X ray emission; XPS

Indexed keywords

CHEMICAL BONDS; DEPOSITION; ELECTRIC EXCITATION; ELECTRONIC STRUCTURE; EMISSION SPECTROSCOPY; HIGH ENERGY ELECTRON DIFFRACTION; SILICATES; THERMOOXIDATION; X RAY PHOTOELECTRON SPECTROSCOPY; X RAY SPECTROSCOPY;

GRAZING INCIDENCE; SI KΒ; X-RAY EMISSION;

LANTHANUM COMPOUNDS;

EID: 1842523291     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2004.01.002     Document Type: Article

References (17)

1. A. Meisel, G. Leonhardt, R. Szargan, X-ray Spectra and Chemical Binding, Chemical Physics, vol. 37, Springer-Verlag, Berlin, 1989.
2. Jonnard P., Bonnelle C., Bosseboeuf A., Danaie K., Beauprez E. Surf. Interf. Anal. 29:2000;255.
3. Kurmaev E.Z., Galakhov V.R., Shamin S.N. Crit. Rev. Solid State Mater. Sci. 23:1998;65.
4. Copel M., Cartier E., Ross F.M. Appl. Phys. Lett. 78:2001;1607.
5. Ino S., Ichikawa T., Okada S. Jpn. J. Appl. Phys. 19:1980;1451.
6. Yamanaka T., Hanada T., Ino S., Daimon H. Jpn. J. Appl. Phys. 31:1992;L1503.
7. Yamauchi S., Hirai M., Kusaka M., Iwami M., Nakamura H., Minomura S., Watabe H., Kawai M., Soezima H. Jpn. J. Appl. Phys. 31:1992;395.
8. O. Gunnarsson, K. Schönhammer, in: K.A. Gschneidner, L. Eyring, S. Hüfner (Eds.), Handbook on the Physics and Chemistry of Rare Earths, vol. 10, North-Holland, Amsterdam, 1987, Chapter 64.
9. Hohnke D., Parthé E. Acta Crystallogr. 20:1966;572.
10. Felsche J. Struct. Bonding. 13:1973;99.
11. Feldman C. Phys. Rev. 117:1960;455.
12. Kurosawa K., Herman P.R., Kurmaev E.Z., Shamin S.N., Galakhov V.R., Takigawa Y., Yokotani A., Kameyama A., Sasaki W. Appl. Surf. Sci. 126:1998;83.
13. S.J.B. Reed, Electron Microprobe Analysis, Cambridge University Press, Cambridge, 1993.
14. Yarmoshenko Y.M., Shamin S.N., Elokhina L.V., Dolgih V.E., Kurmaev E.Z., Bartkowski S., Neumann M., Ederer D.L., Göransson K., Noläng B., Engström I. J. Phys.: Condens. Matter. 9:1997;9403.
15. Gohshi Y., Miyamoto H., Kudo M., Kamada H. Jpn. J. Appl. Phys. Suppl. 17(2):1978;412.
16. Takahashi H., Okumura T., Seo Y. Adv. X-ray Chem. Anal. Jpn. 25:1994;289.
17. Konishi T., Neki K., Fukusima S., Gohshi Y. Adv. X-ray Chem. Anal. Jpn. 19:1988;87.