Submicron coatings for micro-tribological applications

Microsystem Technologies

Volumn 10, Issue 3, 2004, Pages 223-226

  Bandorf, R ^a   Luthje H ^a   Schiffmann, K ^a   Beck, M ^b   Gatzen, H H ^b   Schmidt, M ^c   Buttgenbach S ^c   Brauer G ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

^b LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^c TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATINGS; COMPUTER SIMULATION; ELASTIC MODULI; FRICTION; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS; TRIBOLOGY; WEAR OF MATERIALS;

ASPERITY CONTACT; COEFFICIENT OF FRICTION; MICRO-TRIBOLOGICAL COATING; SUBMICRON COATING;

MICROACTUATORS;

EID: 1842507107     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-0358-z     Document Type: Article

References (12)

1. Bandorf R (2002) Ultradünne tribologische Schicht-systeme für elektromagnetische Mikroaktuatoren. Thesis, Braunschweig, Fraunhofer IRB Verlag
2. Bandorf R; Lüthje H (2002) Tribologische Sub-Mikrometer Schichten für Mikrosysteme. Vakuum in Forschung und Praxis, 14(2): p 87
3. Beck M et al. (2001) Novel test equipment to measure the properties of microtribological interfaces. Wear of Materials, Proceedings, Vancouver
4. Benecke W (1994) Scaling behaviour of micro actuators. Actuator 94, Proceedings, p 65
5. Edler J et al. (2001) A linear microactuator with enhanced design. MICRO SYSTEM technologies, 2001, proceedings, Düsseldorf, p 473
6. Gatzen H-H, Beck M (2001) Tribological investigations on micromachined sliders. TISD, Sendai, Japan, accepted for Tribology International
7. Gatzen HH, Beck M (2002) Wear of structured silicon of different roughness; Heraeus Seminar 2002, Ilmenau, accepted for WEAR
8. Kalb H et al. (1994) Electrostatically driven linear Stepping Motor in LIGA Technic. Actuator 94, Proceedings, p 83
9. Schmitdt M et al. (2001) Novel equipment for friction force measurements on MEMS an microcomponents. SPIE - MEMS design, fabrication, characterization, and packaging, Proceedings, Edinburgh, Vol 4407, p 158
10. Staedler T (2001) Mechanische und tribologische Charakterisierung dünner Schichten mit Hilfe rastersondenbasierter Verfahren. Thesis, Braunschweig, Fraunhofer IRB Verlag
11. Wortmann A (2002) Entwicklung einer Prüfmethode zur messtechnischen Evaluation abrasiver Verschleißresistenz auf der Mikroskala. Thesis, Braunschweig, Fraunhofer IRB Verlag
12. Zhou L et al. (2002) Tribology of textured sliders in near contact situations. IEEE Trans Magn 38(2): p 2159