|
|
Volumn 14, Issue 2, 2002, Pages 87-91
|
|
Tribological sub-micron coatings for microsystems;Tribologische sub-mikrometer schichten für mikrosysteme
a a
a
NONE
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
|
|
EID: 0036539177
PISSN: 0947076X
EISSN: None
Source Type: Journal
DOI: 10.1002/1522-2454(200204)14:2<87::AID-VIPR87>3.0.CO;2-T Document Type: Article |
|
Times cited : (3)
|
|
References (12)
|