Technique for measuring the groove density of a diffraction grating with elimination of the eccentricity effect

Review of Scientific Instruments

Volumn 75, Issue 3, 2004, Pages 780-782

  Lim, Jun ^a   Rah, Seungyu ^a  

^a POSTECH   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARGE COUPLED DEVICES; DIFFRACTOMETERS; FOURIER TRANSFORMS; INTERFEROMETERS; LENSES; MICROSTRUCTURE; NUMERICAL ANALYSIS; OPTICAL BEAM SPLITTERS; POLYNOMIAL APPROXIMATION;

ECCENTRICITY EFFECT; FOURIER TRANSFORM (FT) LENS; GROOVE DENSITY;

DIFFRACTION GRATINGS;

EID: 1842427529     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1647698     Document Type: Article

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