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Review of Scientific Instruments

Volumn 74, Issue 7, 2003, Pages 3544-3548

Technique for measuring the groove density of diffraction gratings using the long trace profiler

(3) Cocco, D a Sostero, G a Zangrando, M b

a SINCROTRONE TRIESTE (Italy)

b Lab Tecn Avanzate Superfici/C (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DENSITY (OPTICAL); IMAGE RECONSTRUCTION; LASER OPTICS; MATHEMATICAL MODELS; MIRRORS; POLYNOMIALS; SCANNING TUNNELING MICROSCOPY; ULTRAVIOLET RADIATION;

DISPERSING RADIATION;

DIFFRACTION GRATINGS;

EID: 0043269335 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.1584080 Document Type: Article

Times cited : (44)

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