Enhancement of electrical activation of aluminum acceptors in 6H-SiC by co-implantation of carbon ions

Materials Science Forum

Volumn 353-356, Issue , 2001, Pages 575-578

  Ohshima, T ^a   Itoh, H ^a   Yoshikawa, M ^a  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CARBON; CARRIER CONCENTRATION; ELECTRIC PROPERTIES; HALL EFFECT; ION IMPLANTATION; SUBSTRATES;

ALUMINUM ACCEPTOR; ELECTRICAL ACTIVATION; HOLE CONCENTRATION;

SILICON CARBIDE;

EID: 18144447806     PISSN: 02555476     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/msf.353-356.575     Document Type: Article

References (10)

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