Hydrogen sensing properties of a Pt-oxide-Al0.24Ga 0.76As high-electron-mobility transistor

Applied Physics Letters

Volumn 86, Issue 11, 2005, Pages 1-3

  Cheng, Chin Chuan ^a   Tsai, Yan Ying ^a   Lin, Kun Wei ^a,b   Chen, Huey Ing ^a   Liu, Wen Chau ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b CHIENKUO TECHNOLOGY UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; INTERFACES (MATERIALS); METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOS DEVICES; PLATINUM COMPOUNDS; POTENTIAL ENERGY; SATURATION (MATERIALS COMPOSITION); TEMPERATURE MEASUREMENT;

CATALYTIC METAL; HYDROGEN ATOMS; HYDROGEN SENSING; INTERFACE SITES;

HIGH ELECTRON MOBILITY TRANSISTORS;

EID: 17944370831     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1883721     Document Type: Article

References (15)

1. Y. Gurbuz, W. P. Kang, J. L. Davidson, and D. V. Kerns, J. Appl. Phys. 84, 6935 (1998).
2. B. Gergen, S. J. Weyers, H. Nienhaus, W. H. Weinberg, and E. W. McFarland, Surf. Sci. 488, 123 (2001).
3. S. Y. Cheng, Mater. Chem. Phys. 78, 525 (2002).
4. T. L. Poteat, B. Lalevic, B. Kuliyev, M. Yousuf, and M. Chen, J. Electron. Mater. 12, 181 (1983).
5. L. M. Lechuga, A. Calle, D. Golmayo, and F. Briones, Sens. Actuators B 7, 614 (1992).
6. C. K. Kim, J. H. Lee, Y. H. Lee, N. I. Cho, D. J. Kim, and W. P. Kang, J. Electron. Mater. 28, 202 (1999).
7. J. Schalwig, G. Muller, M. Eickhoff, O. Ambacher, and M. Stutzmann, Sens. Actuators B 87, 425 (2002).
8. H. I. Chen, Y. I. Chou, and C. Y. Chu, Sens. Actuators B 85, 10 (2003).
9. K. W. Lin, H. I. Chen, C. C. Cheng, H. M. Chuang, C. T. Lu, and W. C. Liu, Sens. Actuators B, 94, 145 (2003).
10. R. Rye and A. J. Ricco, J. Appl. Phys. 62, 1084 (1987).
11. H. I. Chen, Y. I Chou, and C. Y. Chu, Sens. Actuators B 85, 10 (2002).
12. J. P. Xu, P. T. Lai, B. Han, and W. M. Tang, Solid-State Electron. 48, 1673 (2004).
13. C. C. Cheng, Y. Y. Tsai, K. W. Lin, H. I. Chen, C. T. Lu, and W. C. Liu, Sens. Actuators B 99, 425 (2004).
14. I. Lundström and L. G. Petersson, J. Vac. Sci. Technol. A 14, 1539 (1996).
15. K. W. Lin, H. I Chen, C. C. Cheng, H. M. Chuang, C. T Lu, and W. C. Liu, Sens. Actuators B 94, 145 (2003).