Local microwave surface resistance variations of the YBaCuO thin films patterned by selective laser irradiation and plasma fluorination

IEEE Transactions on Applied Superconductivity

Volumn 11, Issue 1 I, 2001, Pages 123-126

  Feng, Y J ^a   Liu, L ^a   Fu, Z L ^a   Wu, L Y ^a   Liu, Q G ^a   You, L X ^a   Kang, L ^a   Yang, S Z ^a   Wu, P M ^a   Wang, S Z ^b  

^a NANJING UNIVERSITY   (China)

^b PEKING UNIVERSITY   (China)

Author keywords

Laser irradiation; Microwave surface resistance; Plasma fluorination; YBa2Cu3O7 thin film

Indexed keywords

IRRADIATION; LASER ABLATION; MICROSTRUCTURE; MICROWAVE DEVICES; PLASMA APPLICATIONS; SUPERCONDUCTIVITY; SURFACE PROPERTIES; TRANSPORT PROPERTIES; YTTRIUM BARIUM COPPER OXIDES;

ION PLASMA TREATMENT; LASER IRRADIATION; MICROWAVE SURFACE RESISTANCE; PLASMA FLUORINATION; YTTRIUM BARIUM COPPER OXIDE THIN FILM;

SUPERCONDUCTING FILMS;

EID: 17844382126     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.919300     Document Type: Conference Paper

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