Measurement of geometric errors in a miniaturized machine tool using capacitance sensors

Journal of Materials Processing Technology

Volumn 164-165, Issue , 2005, Pages 1402-1409

  Lee, J H ^a   Yang, S H ^a  

^a Kyungpook National University   (South Korea)

Author keywords

Capacitance sensor; Error measurement; Geometric error; Meso scale; Miniaturized machine tools

Indexed keywords

ALGORITHMS; ASSEMBLY MACHINES; CAPACITANCE; ERROR CORRECTION; GEOMETRY; SENSORS; SOFTWARE PROTOTYPING; VOLUMETRIC ANALYSIS; LASER INTERFEROMETRY; MACHINE TOOLS; MANUFACTURE;

CAPACITANCE SENSORS; ERROR MEASUREMENT; GEOMETRIC ERRORS; MESO-SCALE; MINIATURIZED MACHINE TOOLS;

MACHINE TOOLS; MEASUREMENT ERRORS;

CAPACITANCE SENSORS; ERROR MEASUREMENTS; GEOMETRIC ERRORS; MESOSCALE; MINIATURIZED MACHINE TOOL;

EID: 17844373564     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2005.02.073     Document Type: Article

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