Geometric error calibration of multi-axis machines using an auto-alignment laser interferometer

Precision Engineering

Volumn 23, Issue 4, 1999, Pages 243-252

  Chen, Jenq Shyong ^a   Kou, Tzu Wei ^a   Chiou, Shen Hwa ^a  

^a S ^*  (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ERROR COMPENSATION; INTERFEROMETERS; PRECISION ENGINEERING;

AUTO-ALIGNMENT LASER INTERFEROMETERS; GEOMETRIC ERROR CALIBRATION; MULTI-AXIS MACHINES;

ALIGNMENT;

EID: 0032644784     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(99)00016-1     Document Type: Article

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