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Volumn 175-177, Issue , 2001, Pages 108-112
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Artificial neural network analysis of RBS data of Er-implanted sapphire
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Author keywords
[No Author keywords available]
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Indexed keywords
ALGORITHMS;
BACKPROPAGATION;
ERBIUM;
ION IMPLANTATION;
NEURAL NETWORKS;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SPECTROMETRY;
SURFACE STRUCTURE;
ELEMENTAL DEPTH PROFILING;
RUTHERFORD BACKSCATTERING SPECTROMETRY (RBS);
SAPPHIRE;
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EID: 17744415859
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(00)00548-6 Document Type: Conference Paper |
Times cited : (6)
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References (16)
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