A DFT study of amorphous silicon oxynitride

Journal of Non-Crystalline Solids

Volumn 351, Issue 12-13, 2005, Pages 1127-1132

  Kroll, Peter ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; COMPUTER SIMULATION; GATES (TRANSISTOR); GLASS; MICROELECTRONICS; MOLECULAR DYNAMICS; OPTIMIZATION; PHASE DIAGRAMS; REFRACTIVE INDEX; SILICA; SILICON CARBIDE; STOICHIOMETRY; TOPOLOGY;

CHEMICAL STABILITY; CONTINUOUS RANDOM ALTERNATING NETWORKS (CRAN); GATE DIELECTRIC THICKNESS; STRUCTURAL STABILITY;

AMORPHOUS MATERIALS;

EID: 17744383817     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2005.01.026     Document Type: Conference Paper

References (17)

1. A. Izumi, and H. Matsumura Appl. Phys. Lett. 71 1980 1372
2. X. Pan, H. Gu, R. van Weeren, S.C. Danforth, R.M. Cannon, and M. Rühle J. Am. Ceram. Soc. 79 1996 2313
3. H. Gu, R.M. Cannon, and M. Rühle J. Mater. Res. 13 1998 376
4. H. Gu, R.M. Cannon, H.J. Seifert, M.J. Hoffmann, and I. Tanaka J. Am. Ceram. Soc. 85 2002 25
5. W.H. Zachariasen J. Am. Chem. Soc. 54 1932 3841
6. F. Wooten, K. Winer, and D. Waire Phys. Rev. Lett. 54 1985 1392
7. P. Kroll J. Non-Cryst. Solids 293-295 2001 238
8. P. Kroll J. Mater. Chem. 13 2003 1657
9. P. Kroll, Comput. Mater. Sci., submitted for publication
10. P. Kroll Mater. Res. Soc. Symp. Proc. 731 2002 249
11. P.N. Keating Phys. Rev. 145 1966 637
12. P. Hohenberg, and W. Kohn Phys. Rev. 136 1964 B864
13. M.C. Payne, M.P. Teter, D.C. Allan, T.A. Arias, and J.D. Joannopoulos Rev. Mod. Phys. 64 1992 1045
14. G. Kresse, and J. Hafner Phys. Rev. B 47 1993 558
15. G. Kresse, and J. Hafner Phys. Rev. B 49 1994 14251
16. G. Kresse, and J. Furthmüller Comput. Mater. Sci. 6 1996 15
17. G. Kresse, and J. Furthmüller Phys. Rev. B 54 1996 11169